Wafer Manufacturing Tool RIE-4 Installation

Description

IPS provided complete mechanical, electrical, plumbing, and architectural design for a Reactive Ion Etch tool installation. The project included the expansion of a 1,000-sf Class 1,000 cleanroom space and 1,200-sf utility core space.

This project is classified under Chemical-Terrorism Vulnerability Information (CVI) and special training was required for all team members. The project utilized 3-D software to map critical utilities, a toxic gas cabinet, and the supporting infrastructure equipment to serve the RIE tool.

IPS was recognized for leadership in promoting an integrated design program to client stakeholders and construction teams that comply with CVI access rights and requirements.

Project Details

LOCATION

San Jose, CA

MARKET

High Tech

PROJECT SIZE

2,000 sf

SERVICES
  • 3D Model
  • MEP Engineering
  • Architecture
  • Structural Engineering
  • Construction Management
KEY SYSTEMS
  • Tool Installation
  • Process Gases
  • Toxic Gas
  • Scrubber Exhaust
  • Cleanroom

Company Profile

This corporation is known as one of the world’s largest computer hard disk drive manufacturers. With a decades-long history in the tech industry, the company serves clients, and their data management needs, worldwide.